Chemical Delivery System

Find chemical distribution unit or bulk chemical delivery systems with accurate dosing, self-alarming and real time monitoring functions, without worrying about installation or maintenance difficulty.

Trusted by Partners :

Lifetime Support

Easy Cooperation Steps

Communication

Demand: Comprehensive Solutions

Budget: Cost Effective Quotation

Lead Time: Saving-time Supply Plan

Free Consultant
Custom Solutions
Order Confirm

Production

Craft: Sample Wafer Deliver for Approval

Quality: Pre-inspection before Shipping

Tracking Progress: Report Routinely

100% Inspection
Welcome to Visit Workshop

On-site Set Up

Installation: According to your layout space

Debugging: Trail run to mass production capacity

Your Verification:Formal Operation

After-sale Support
Trial Production
Maintanance

ZENITH Chemical Delivery System

Zenith chemical distribution system offers you full types of choices, including single/dual drum CDS unit, diluting and blending chemical delivery systems, with standard solutions that compliant with SEMI specifications or customized design.

Chemical Delivery Equipment

Mainly used for conveying, weighing, proportioning and other functions of various chemical liquids. Generally equipped with pumps, dampers, filters, and gas-liquid separators.

  • Automatic switching Function
  • Cut-off Leak Detection Function
  • Negative Pressure Fault Alarm Function
  • Real Time Monitoring: pressure, flow, PH detection
  • afety Equipped Devices: Related alarm safety interlock, fire extinguishing systems and high-temperature alarm interlocks, ensuring high safety, stability, controllability, and adjustability of the liquid during the supply process.

Bulk Chemical Delivery System (BCDS)

Transfer chemicals from large tanks (e.g., ISO tanks) to multiple points of use in a factory, commonly used in semiconductor fabs

Local Chemical Delivery System (LCDS)

Supply chemicals precisely to a specific tool or area, often linked to a bulk system.

Point-of-Use Delivery System (POU)

Installed near process tools to provide precise and safe chemical supply

Chemical Dilution System

Diluting high-concentration stock chemicals like HF or H2SO4 to the required working concentration

Chemical Blending System

Accurately mixes multiple chemicals to create a precise formula for production use

Chemical Collection/Waste System

Collect and transfer waste liquids to a central system, preventing cross-contamination

Pressure-based Delivery System

Use air or nitrogen pressure to drive chemical flow, offering a simple and reliable solution

Pump-based Delivery System

Bellows pumps or diaphragm types to precisely control flow and pressure for high-accuracy applications

Gravity Feed System

Use gravity to deliver liquids, suitable for simple and low-risk applications

Competitiveness of Chemical Distribution System

Zenith temperature control machines control temperature from -80 to 180 ℃ stably (precision reach up to ± 0.01 ℃), and both single and double channels can achieve separate temperature control, maintaining a relatively stable cooling effect during long-term operation, using branded compressors with high reliability, built-in safety protection, and advantages such as low noise, power saving, and durability.

Custom Choices

Single drum, dual drum, unit or bulk system, equipment appearance, craft designs, chemical compatible solutions, etc.

Accurate Dosing Control

TEC series precision chiller can reach up to ± 0.01 ℃, which is the top level performance in industrial chiller equipment market

Safety Control

Self alarming safety interlock, fire extinguishing systems, leak detection,and high-temperature alarm interlocks

Real Time Monitor

Real time flow monitoring and pressure monitoring functions, leakage monitoring, and PH monitoring.

Wide Applications and Markets of CDS

CDS is mainly used to provide 24-hour uninterrupted supply of high-purity chemical solution for production lines, which is widely used in various industries to accurately and safely transport, store, and dispense chemicals required for production, processing, or research.

Semiconductor
Medical Industry
Testing Labs
Chemical Industry
Water Treatment
Food and Beverage

Semiconductor Fabrication Industry

Delivering ultra-pure acids, solvents, and gases during wafer processing steps such as etching, cleaning(Wet Bench, Acid Clean, RCA Clean), doping, CMP and Photoresist Coating.

  • Bulk Chemical Delivery Systems (BCDS): For high-volume acids/solvents from drums or totes to the fab.
  • Blending and Dilution Systems: For mixing ultrapure chemicals with UPW (ultrapure water) to the required concentration.
  • Gas Cabinets and Panels: For dopant gases (e.g., arsine, phosphine) and other specialty gases.

Medical and Pharmaceutical Industries

To ensure sterile and accurate delivery of reagents and active pharmaceutical ingredients (APIs) in drug formulation and production.

  • Skid-Mounted Chemical Feed Systems: For accurate dosing of liquid ingredients into reactors or mixers.
  • Sterile Transfer Units: Single-use or stainless systems for sterile chemical delivery.
  • Automated Dosing Systems: With GMP-compliant control for small-volume reagent addition.
  • CIP/SIP Systems: For delivering cleaning agents or steam to production equipment without disassembly.

Laboratory CDS Applications

Laboratories use CDS such as benchtop reagent dispensers and gas panels to ensure precise, safe, and contamination-free handling of chemicals in applications like synthesis, analysis, and sterile processing.

  • Precision Dosing Experiment: Exact, repeatable dosing of reagents in small volumes during analysis.
  • Lab-Scale Blending/Dilution Modules: Create accurate chemical mixtures or dilutions for R&D, calibration, or experimentation.
  • Reagent Delivery Systems: Feed HPLC, ICP, or pure solvents/acids.

Chemical Industry CDS Applications

To handle corrosive, volatile, or reactive chemicals under controlled conditions for synthesis and formulation.

  • Corrosion-Resistant Chemical Feed Skids: Often built with PTFE/PFA-lined piping and dosing pumps.
  • Automated Drum Unloaders: For safe transfer of hazardous chemicals.
  • Flow-Control and Monitoring Units: With high-precision valves and real-time data feedback.

Water Treatment Industry

For metering chemicals like chlorine, coagulants, and pH adjusters into municipal and industrial water systems.

  • Chemical Metering Pumps: For chlorine, alum, lime, acids, etc.
  • Bulk Storage Tanks with Day Tanks: For large-scale chemical storage and feed.
  • Batch Dosing Systems: For treatment plants operating in batch mode.

Food and Beverage Industry

For injecting precise amounts of additives, preservatives, or cleaning agents in compliance with hygiene and safety standards.

  • Automated Ingredient Dosing Units: For adding small but precise quantities of additives.
  • CIP Chemical Delivery Skids: For delivery of caustic, acid, and sanitizers.
  • Peristaltic and Hygienic Diaphragm Pumps: For sanitary chemical handling.

One Stop Services for CDS

Provide one-stop services for the research and development, production, and technical consultation of chemical delivery unit, bulk chemical delivery systems and related chemical solutions.

12 Months Waranty Service

Within warranty period, Replacing Parts are Provided for Free. After warranty period, parts for replacement can be provided at cost price. Lifetime services are offered.

On-Site Set up Service

Whole machine on-site installation, adjusting, commissioning, debugging operation, Calibration, qualification and approval to run, easy to maintenance.

OEM&ODM Service

We accept order industrial electroplating barrel machine with private labels. Zenith offer original craft design. Custom automatic wafer sorter machines are also available.

Consumables for Wafer Processing Machines

For Wafer

Valves, pumps and tanks

For Advanced Packaging

Acid Solution

For Display Process

Alkali solution

Auxiliary Reagent

Other Chemical Solution

FAQs

Does ZENITH offer components for replacement after waranty period?

Yes, the cooperation support will not end after waranty period. But the price of component for replacement should be at cost price, while in waranty period this price is free. In addition, if you offer a new order of equipment, the price could be communicated.

Does Zenith provide install and tuning services?

Yes. We provide on-site set up services. Install, commissioning, calibration and debugging services are offered by our engineers. You can send us your lead time demands and we offer you ideal solusions.

Does ZENITH have OEM&ODM services?

Yes, we could provide private label, custom appearance or white label services. Customization services are available according to your demands.

What special advantage does Zenith CDS have?

Zenith chemical delivery equipment can meet your demand of blending, Dilution, collection, etc, offering custom options to meet your demands, focusing on semiconductor industry for decades. Whatever station of wafer processing that demands CDS, our equipment can fulfill your custom line requirements.

What other wafer processing machines does Zenith provide?

Other than chemical delivery systems, Zenith aslo offers custom equipment solutions for industrial chillers, cleaning machines, electroplating equipment, electroless plating equipment, spin rinse dryers, and other semiconductor fabrication processing equipment, etc.

Knowlegde Base of Chemical Delivery System

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