Minimize defects and maximize yield. ZENITH Marangoni Dryers provide precise, particle-free drying with wafer breakage rate <0.01%, defect reduction >40%, and uptime ≥98%.
Demand: Comprehensive Solutions
Budget: Cost Effective Quotation
Lead Time: Saving-time Supply Plan
Craft: Sample Wafer Deliver for Approval
Quality: Pre-inspection before Shipping
Tracking Progress: Report Routinely
Installation: According to your layout space
Debugging: Trail run to mass production capacity
Your Verification:Formal Operation
ZENITH Marangoni Dryer delivers precise drying, flawless wafers and high yield, help you reach IPA consumption reduction >30%, drying cycle shortened by 25% and defect reduction >40%.
Marangoni dryers are used after cleaning station to remove residual liquids from wafer surfaces without leaving watermarks or particles, ensuring high-quality semiconductor fabrication.
Zenith offers you custom drying equipment according to the specific requirements of your production line, and offers you quotation that 20% more competitive than industry peers.
No watermarks and no particle residue on wafers for superior quality
Particle rate < 0.01%, help you achieve high yield & decrease cost of defect
Supports two-shift continuous operation with Uptime ≥ 98%, MTTR ≤ 4h, MTBF ≥ 450h
Less than 10 minutes, adjustable according to process recipes
Marangoni Dryers play a vital role across FEOL, MEOL, BEOL, and advanced packaging (ATP) by ensuring wafers exit wet processes completely dry, free of particles, and without watermarks.
Marangoni Dryers prevent watermarks during gate oxide cleaning and shallow trench isolation.
Marangoni Dryers ensure particle-free surfaces in TSV formation and wafer-level packaging.
Marangoni Dryers reduce defect risks in copper/low-k interconnect processes.
Marangoni Dryers enable high-yield 3D IC and heterogeneous integration.
Marangoni Dryers deliver residue-free surfaces in ICT cleaning, eliminating watermarks and particle contamination.
Marangoni Dryers ensure defect-free drying for delicate MEMS structures, maintaining device performance and reliability.
Got questions? Take a look at our quick answers caring for your concerns.
Yes, the cooperation support will not end after warranty period. But the price of components for replacement should be at cost price, while in warranty period this price is free. In addition, if you offer a new order of equipment, the price could be communicated.
Yes. We provide on-site set up services. Install, commissioning, calibration and debugging services are offered by our engineers. You can send us your lead time demands and we offer you ideal solutions.
Yes, we could provide private label, custom appearance or white label services. Customization services are available according to your demands.
A Marangoni Dryer is a wafer drying system that uses the surface tension gradient created by isopropyl alcohol (IPA) vapor to displace water from wafer surfaces. This results in ultra-clean drying without watermarks, stains, or particle redeposition.
IPA vapor is introduced in a controlled manner at the wafer surface. The difference in surface tension between water and IPA drives water upward and off the wafer. This displacement drying ensures wafers are completely dry without spinning or heating.
Other than marangoni dryers, Zenith also offers other equipment and consumables in semiconductor fab processes, including wet benches, cleaning machines, IPA, to provide comprehensive services for your lines.
Within warranty period, Replacing Parts are Provided for Free. After warranty period, parts for replacement can be provided at cost price. Lifetime services are offered.
Supported by real process data and collaborative testing with the Chinese Academy of Sciences, ensuring measurable defect reduction (>40%).
We accept order industrial chiller machine with private labels. Zenith offers original craft design. Custom automatic wafer sorting machines are also available.
For Wafer
Valves, pumps and tanks
For Advanced Packaging
Acid Solution
For Display Process
Alkali solution
IPA
Other Chemical Solution
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We help you avoid the pitfalls to deliver the quality and value your wafer drying need, on-time and on-budget.
