Industrial Chiller Equipment

Zenith, an industrial chiller manufafcturer in China, focusing on semiconductor and wafer processing equipment supplying.

Trusted by Partners :

Lifetime Support

Easy Cooperation Steps

Communication

Demand: Comprehensive Solutions

Budget: Cost Effective Quotation

Lead Time: Saving-time Supply Plan

Free Consultant
Custom Solutions
Order Confirm

Production

Craft: Sample Wafer Deliver for Approval

Quality: Pre-inspection before Shipping

Tracking Progress: Report Routinely

100% Inspection
Welcome to Visit Workshop

On-site Set Up

Installation: According to your layout space

Debugging: Trail run to mass production capacity

Your Verification:Formal Operation

After-sale Support
Trial Production
Maintanance

Types of Chiller Equipment

Zenith industrial chiler offers all kinds of TEC chillers and compressor chillers, help you control temperature with 0.01℃ high precision with exclusive solutions to meet your demands.

TEC Semiconductor Chiller

TEC chiller (thermoelectric cooler chiller) is a solid-state cooling system that uses thermoelectric modules (TECs) to transfer heat via the Peltier effect, offering precise temperature control and is ideal for applications requiring compactness, silence, and high reliability.

  • Temperature Precision: 0.01℃/ ±0.02℃/±0.05℃/±0.1℃
  • Operating Temperature Range: -20.0~99.9℃
  • Wetted Parts Material: SUS 304 /EPDM /PE /NBR /PFA /Al /ABS /PA /GF /PP /Cu /etc
  • Heating Capacity: Custom Options /400W /1100W /1700W /2000W /2400W /3200W
  • Cooling Capacity: Custom Options /180W /500W /700W /900W /1200W /2000W

TEC Special Chemical Fluid Water Cooled Chiller

Circulating Fluid: Acid/Mixture/Special Solutions
Operating Temperature Range: 10.0~60.0℃
Temperature Display Precision: 0.01℃

TEC Integrated Chiller

Operating Temperature Range: -20.0~99.9℃
Temperature Precision: ±0.05℃
Connector Size: 1/8’’ CPC Fast Connection

TEC Mini Air Cooled Chiller

Operating Temperature Range: 2.0~45.0℃
Temperature Precision: ±0.02℃
Connector Size: 1/8’’ CPC Fast Connection

TEC Air Cooled Chiller

Heating/Coolling/PID Control
Operating Temperature Range: 10.0~60.0℃
Temperature Precision: ±0.05℃

Pure Water TEC Water Cooled Chiller

Heating/Coolling/PID Control
Operating Temperature Range: 10.0~60.0℃
Temperature Precision: ±0.05℃

Chemical Liquid TEC Water Cooled Chiller

Circulating Fluid: 15% C2H6O2/ Fluoridation
Operating Temperature Range: -20.0~90.0℃
Temperature Precision: ±0.02℃

Compressor Chiller

A compressor chiller (or vapor-compression chiller) is a cooling system that removes heat from liquid (typically water or a water-glycol mixture). It is the most common chiller used in industrial processes, commercial buildings and HVAC systems due to its efficiency and scalability.

  • Temperature Precision: ±0.1℃/±0.3℃/±0.5℃/±1℃
  • Operating Temperature Range: -80~180℃
  • Wetted Parts Material: SUS304 /EPDM /PP /HDPE /VMQ /CU /PVC /PTFE /POM /etc
  • Heating Capacity: Custom Options /400W /2000W /3000W /8000W /1kW /3kW /6kW
  • Cooling Capacity: Custom Options /800W /1500W /5000W /7000W /3.5kW /11.5kW /20kW

Water Cooled High Precision Chiller

Heating/Coolling/PID Control
Operating Temperature Range: 5.0℃~40.0℃
Temperature Precision: ±0.1℃

Air Cooled High Precision Single Channel Chiller

Heating/Coolling/PID Control
Operating Temperature Range: 5.0℃~40.0℃
Temperature Precision: ±0.1℃

Air Cooled High Precision Dual Channels Chiller

Heating/Coolling/PID Control
Operating Temperature Range: 5.0℃~40.0℃
Temperature Precision: ±0.1/±0.5℃

Low Temperature Water Cooled Channel Chiller

Operating Temperature Range: -80~180℃
Temperature Precision: ±0.1℃

Low Temperature Air Cooled Channel Chiller

Operating Temperature Range: -40.0~150.0℃/-60.0~180.0℃
Temperature Precision: ±0.1/0.5℃

Rack Mount Type Chiller

PID Control
Operating Temperature Range: 5.0~40.0℃
Temperature Precision: ±0.1℃
01

Competitiveness of ZENITH Chiller Equipment

Zenith chiller machines control temperature from -80 to 180 ℃ stably (precision reach up to ± 0.01 ℃), and both single and double channels can achieve separate temperature control, maintaining a relatively stable cooling effect during long-term operation, using branded compressors with high reliability, built-in safety protection, and advantages such as low noise, power saving, and durability.

Custom Choices

Cooling capacity, Materials, Heat Exchange Power, Heat Exchange Methods, Local Compatible Plugs, Commucation Methods, Power, Cooling and Heating Capacity, etc.

Accurate Temperature Control

TEC series precision chiller can reach up to ± 0.01 ℃, which is the top level performance in industrial chiller equipment market

Corrosion Resistance

PFA and VITON connecting materials offer great corrosion resistance in strong acid and alkali solutions

Remote Control

Remote control can be achieved through communication methods such as RS485/RS232, ETH, and Ethernet. Customized Configs can be selected according to your demands.

Wide Applications and Markets of Industrial Chiller

Industrial Chiller Machines are widely used in various industries, such as semiconductor chiller, medical equipment cooling, temperature control of electronic component or communication systems , laboratory temperature control for various testing equipment, and heat exchange systems for chemical, laser, medical, electroplating, vacuum equipment, etc.

Semiconductor
Medical Industry
Testing Labs
Chemical Industry
Laser Welding
Electronic Cooling

Semiconductor Chiller Applications

Semiconductor manufacturing's strict requirements for temperature control have given rise to the systematic application of chillers in dozens of wafer processes.

  • Photoresist Coating: Ultra-precise ±0.01°C chiller control stabilizes photoresist viscosity.
  • DUV/EUV Lithography: Dual-loop chillers with < 50ms response time manage laser heat flux (5-10 kW) to prevent optical distortion in 5nm node patterning.
  • Dry Etching: Cryogenic chillers (-50°C) using R290/R600a refrigerants suppress byproduct deposition.

Semiconductor Chiller Applications

Semiconductor manufacturing's strict requirements for temperature control have given rise to the systematic application of chillers in dozens of wafer processes.

  • Photoresist Coating: Ultra-precise ±0.01°C chiller control stabilizes photoresist viscosity.
  • DUV/EUV Lithography: Dual-loop chillers with < 50ms response time manage laser heat flux (5-10 kW) to prevent optical distortion in 5nm node patterning.
  • Dry Etching: Cryogenic chillers (-50°C) using R290/R600a refrigerants suppress byproduct deposition.

Semiconductor Chiller Applications

Semiconductor manufacturing's strict requirements for temperature control have given rise to the systematic application of chillers in dozens of wafer processes.

  • Photoresist Coating: Ultra-precise ±0.01°C chiller control stabilizes photoresist viscosity.
  • DUV/EUV Lithography: Dual-loop chillers with < 50ms response time manage laser heat flux (5-10 kW) to prevent optical distortion in 5nm node patterning.
  • Dry Etching: Cryogenic chillers (-50°C) using R290/R600a refrigerants suppress byproduct deposition.

Semiconductor Chiller Applications

Semiconductor manufacturing's strict requirements for temperature control have given rise to the systematic application of chillers in dozens of wafer processes.

  • Photoresist Coating: Ultra-precise ±0.01°C chiller control stabilizes photoresist viscosity.
  • DUV/EUV Lithography: Dual-loop chillers with < 50ms response time manage laser heat flux (5-10 kW) to prevent optical distortion in 5nm node patterning.
  • Dry Etching: Cryogenic chillers (-50°C) using R290/R600a refrigerants suppress byproduct deposition.

Semiconductor Chiller Applications

Semiconductor manufacturing's strict requirements for temperature control have given rise to the systematic application of chillers in dozens of wafer processes.

  • Photoresist Coating: Ultra-precise ±0.01°C chiller control stabilizes photoresist viscosity.
  • DUV/EUV Lithography: Dual-loop chillers with < 50ms response time manage laser heat flux (5-10 kW) to prevent optical distortion in 5nm node patterning.
  • Dry Etching: Cryogenic chillers (-50°C) using R290/R600a refrigerants suppress byproduct deposition.

Semiconductor Chiller Applications

Semiconductor manufacturing's strict requirements for temperature control have given rise to the systematic application of chillers in dozens of wafer processes.

  • Photoresist Coating: Ultra-precise ±0.01°C chiller control stabilizes photoresist viscosity.
  • DUV/EUV Lithography: Dual-loop chillers with < 50ms response time manage laser heat flux (5-10 kW) to prevent optical distortion in 5nm node patterning.
  • Dry Etching: Cryogenic chillers (-50°C) using R290/R600a refrigerants suppress byproduct deposition.

Trusted by Global Partners

Wafer
Packaging
Other Processes

One Stop Services for Wafer Electroless Plating Machine Purchase

Provide one-stop services for the research and development, production, and technical consultation of semiconductor, compressor, direct heat exchange chillers, airflow meters, and other machines

12 Months Waranty Service

Within warranty period, Replacing Parts are Provided for Free. After warranty period, parts for replacement can be provided at cost price. Lifetime services are offered.

Sample Delivery Service

Accept samples from customers to test electroplating craft by small batches. You can verify our machine performance by the samples. We cooperate with colleages, testing data can be provided.

OEM&ODM Service

We accept order industrial electroplating barrel machine with private labels. Zenith offer original craft design. Custom automatic wafer sorter machines are also available.

Consumables for Wafer Processing Machines

For Wafer

Valves, pumps and tanks

For Advanced Packaging

Acid Solution

For Display Process

Alkali solution

Auxiliary Reagent

Other Chemical Solution

Related Chiller Accessories and Devices

Other than relevent chemical solutions that chiller consumes, Zenith also provides related chiller accessories and devices for your convenience.

Air Cooled Air Flow Meter

Operating Temperature Range: -100~225℃     
Testing Performance:      
12s From +125℃ to -55℃     
10s From -55℃ to +125℃

Temperature Controller

Display module Size: 72*72*75mm      
Temperature Precision: ±0.01℃      
PCB Protection Function: Abnormal Warning

Heating Plate

Wafer Size: 8’’/12’’      
Temperature Precision: ±0.2℃      
Product Materials: Al / Stainless Steel

Cooling Plate

Wafer Size: 6’’/8’’/12’’      
Temperature Precision: ±0.05℃ (Al)      
Product Materials: Al / Stainless Steel

FAQs

Does ZENITH offer components for replacement after waranty period?

Yes, the cooperation support will not end after waranty period. But the price of component for replacement should be at cost price, while in waranty period this price is free. In addition, if you offer a new order of equipment, the price could be communicated.

Does Zenith provide install and tuning services?

Yes. We provide on-site set up services. Install, commissioning, calibration and debugging services are offered by our engineers. You can send us your lead time demands and we offer you ideal solusions.

Does ZENITH have OEM&ODM services?

Yes, we could provide private label, custom appearance or white label services. Customization services are available according to your demands.

What special advantage does Zenith SRD machines have?

Zenith chiller equipment can reach the top level precision of temperature control: ±0.01 ℃,offering custom options to meet your demands, focusing on semiconductor industry for decades. Whatever station of wafer processing that demands chiller machines, our equipment can fufill your custom line requirements.

What other wafer processing machines does Zenith provide?

Other than industrial chillers, Zenith aslo offers custom equipment solutions for industrial cleaning machines, electroplating equipment, electroless plating equipment, spin rinse dryers, chemical delivery system, etc.

Knowlegde Base of Industrial Chiller Equipment

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